Integrated Circuit Manufacturing Technology (21st Century Vocational and Technical College Series Textbooks)

Author: Lin Mingxiang (Compiler)
Publisher:
Publish Date: 2005-10-01
Features: This book is written based on the characteristics of higher vocational education and is a textbook that integrates the principles of integrated circuit manufacturing processes and technology. Since silicon devices occupy the vast majority of microelectronic products, this textbook takes silicon planar technology as the main focus while also introducing other processes such as gallium arsenide. The book consists of 15 chapters, covering topics such as silicon single crystal preparation, thin film preparation techniques like epitaxy, oxidation, sputtering (evaporation), and chemical vapor deposition; doping techniques such as diffusion and ion implantation; graphic processing techniques including mask making, lithography, etching, and CAD; metallization and planarization, assembly engineering, product reliability, as well as peripheral processing techniques like cleanroom technology and deionized water preparation. This book is suitable as a textbook for electronic information technology-related programs in higher vocational and technical colleges, and also as a training manual for intermediate and advanced technical workers in the microelectronics industry.