Thin film growth

Author: Wu Zi-qin
Publisher:
Publish Date: 2001-09-01
Features: This book is one of the "CAS Graduate Teaching Series." It focuses on the key aspects of thin film science—thin film growth. The book consists of 15 chapters, organized into five main sections:
Chapters 1 to 4 introduce the fundamentals of phase equilibrium and atomic structure on crystal surfaces from the perspective of thin films.
Chapters 5 to 7 cover defects and diffusion in thin films.
Chapters 8 and 9 discuss the three modes of thin film growth and the kinetics of nucleation and growth.
Chapters 10 to 13 explore the growth of metal thin films, semiconductor thin films, and oxide thin films, as well as the fractal phenomena observed during growth.
Chapters 14 and 15 introduce various methods for thin film preparation and research.
This book not only systematically presents the solid-state physics knowledge related to thin film growth but also covers the latest advancements in thin film growth and the cutting-edge techniques for thin film characterization. It can serve as a teaching text for graduate students in solid-state physics and materials science, as well as a reference for scientists and engineers involved in thin film research and production.