Microsensor and Microactuator: The Complete Book

Author: Zhang Wendong
Publisher:
Publish Date: 2003-03-01
Features: This book is an important work and the preferred technical reference on microelectromechanical systems (MEMS). It is divided into nine chapters, covering almost all research fields of MEMS technology. It elaborates on the fundamental principles of MEMS in various fields and, based on this, provides detailed introductions to the design and processing of typical devices and systems. Particularly, the book offers a large number of references, providing readers with comprehensive background information for referencing domestic and international research. This book is available for scholars and experts in MEMS and related fields, research and technical personnel, as well as faculty and students of universities and colleges to consult and use.