Principles and Engineering Technology of Microelectronics Manufacturing: Second Edition

Author: Stephen A. Campbell
Publisher:
Publish Date: 2003-01-01
Features: This book systematically introduces the scientific principles and engineering technologies of microelectronics manufacturing, covering all the fundamental single processes involved in integrated circuit manufacturing, including lithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, atmospheric chemical vapor deposition, sputtering, and chemical vapor deposition.