Integrated Chemical Microsensor System in CMOS Technology

Author: Heileman
Publisher:
Publish Date: 2007-01-01
Features: This book covers all aspects of CMOS chemical microsensor systems and provides a detailed discussion on the integration techniques of chemical microsensors in CMOS. After a brief introduction, it elaborates on all basic knowledge, introduces various chemical sensing methods, and presents CMOS technology and its applications in microsensors. Finally, it offers an outlook on future developments. The book is rich in content, encompassing extensive fundamental knowledge and important information related to chemical microsensors in CMOS technology. It is suitable for students, engineering technicians, and scientists who wish to work in this field, as well as for experts familiar with the field who may find it a valuable reference.