Microelectromechanical Photonics - Photocopy Edition

Author: (Japan) H. Ukita
Publisher:
Publish Date: 2007-01-01
Features: Optical MEMS is a hot field in MEMS and one of the important development directions of MEMS. This book systematically discusses optical MEMS and microelectromechanical photonics, elaborating on the theory and experimental structures of this field, and introducing various devices and their applications. The content covers multiple devices such as laser diodes, resonant sensors, and optical tweezers, and finally, it provides an outlook on the future development of microelectromechanical photonics. The book is rich in content and systematically explains optical MEMS, serving as a reference for students and engineering technicians in this field. Optical MEMS is a hot field in MEMS and one of the important development directions of MEMS. This book systematically discusses optical MEMS and microelectromechanical photonics, elaborating on the theory and experimental structures of this field, and introducing various devices and their applications. The content covers multiple devices such as laser diodes, resonant sensors, and optical tweezers, and finally, it provides an outlook on the future development of microelectromechanical photonics. The book is rich in content and systematically explains optical MEMS, serving as a reference for students and engineering technicians in this field.