Semiconductor Device Physics and Process (Second Edition)

Author: Shi Min
Publisher:
Publish Date: 2002-12-01
Features: "Semiconductor Device Physics and Technology" (2nd Edition) introduces the physical principles of modern semiconductor devices and advanced process technologies. It can serve as a textbook for undergraduate students in applied physics, electrical engineering, electronic engineering, and materials science, as well as a reference for engineers and scientists who need to understand the latest developments in devices and technologies. First, Chapter 1 provides a brief historical review of major semiconductor devices and key technologies. The book primarily covers the physical principles of modern semiconductor devices, the working principles of integrated circuits, and the process technologies involved in their fabrication. The book is divided into three parts, fourteen chapters, and includes twelve appendices.