RF MEMS theory. design. technology

Author: (USA) Reitz
Publisher:
Publish Date: 2005-12-01
Features: This book is divided into 15 chapters, mainly including: static, dynamic, and electromagnetic models of RFMEMS devices; the fabrication, packaging, reliability, and power handling capabilities of MEMS switches; circuit design of MEMS switches; MEMS phase shifters, capacitors, tunable oscillators, and inductors; reconfigurable MEMS networks, filters, antennas, and subsystems; phase noise analysis of MEMS circuits, phase shifters, and oscillators; it also introduces the application fields of RFMEMS switches, international RFMEMS research progress, and future development directions. This book is widely referenced and deeply written, serving as an authoritative work in the field. It is suitable for senior undergraduate and graduate students, as well as engineering professionals in the fields of microelectronics technology, microwave technology, and microelectromechanical systems technology.