Microelectronics Process Fundamentals

Author: Li Weiwei
Publisher:
Publish Date: 2007-01-01
Features: To enable relevant readers to gain a deeper understanding and mastery of the principles of microelectronics process technology, the first part of this book primarily introduces the relevant physics and chemistry knowledge in the integrated circuit fabrication process. Chapters 4 to 10 are the key sections of the book, covering process procedures, process equipment, as well as new technologies and methods in IC fabrication. The book is divided into 10 chapters, with main content involving the chemical properties of semiconductor silicon materials and compounds, the preparation of high-purity water, cleaning techniques, oxidation, diffusion, etching, lithography, epitaxy, metallization, electronic packaging, and the principles of other major processes. This book can serve as a textbook for relevant majors in higher education institutions, a reference for teachers and postgraduate students, and also provide reference material for a broad range of engineering technicians engaged in microelectronics-related fields.