Gas phase deposition application technology

Author: Wang Fuzhen, Ma Wencun
Publisher:
Publish Date: 2007-01-01
Features: The first part of this book comprehensively elaborates on the technical foundations, principles, new deposition techniques, process procedures, equipment, and film quality testing and analysis of chemical vapor deposition, physical vapor deposition, and plasma-enhanced chemical vapor deposition. The second part introduces the applications of vapor deposition technology in various fields, including hard coatings for industrial tools and dies, protective coatings, optical thin films, architectural coated glass, solar energy utilization, integrated circuit manufacturing, information storage, display devices, decorative coatings, plastic metallization, and wound film products on flexible substrates. The book is rich in content and novel, striving to closely connect with practical applications. It is suitable for engineering technicians, scientific workers, students, and workers engaged in vapor deposition technology, as well as serving as a reference book for related disciplines.