Author: Zhang Tonghe, Wu Yuguang (editors)
Publisher:
Publish Date: 2005-10-25
Features: This book mainly includes ion beam implantation technology, ion beam enhanced deposition technology, magnetron ion beam deposition technology, full-range ion implantation technology, strong pulsed ion beam material modification technology, and ion beam-based novel thin film engineering techniques.
Ion Beam Surface Engineering and Applications
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