Silicon Ultra-Large Scale Integrated Circuit Process Technology Theory, Practice, and Scale

Author: James D. Plummer
Publisher:
Publish Date: 2004-04-01
Features: This book is used as the textbook for the "Silicon VLSI Manufacturing Processes" course at the Electrical Engineering Department of Stanford University. The course is designed for senior undergraduate students and first-year graduate students in the field of microelectronics within the Electrical Engineering Department. The greatest feature of this book is that it not only provides a detailed introduction to the practical process technologies related to the production and manufacturing of silicon VLSI chips but also thoroughly explains the physical images behind these process technologies. Additionally, the book includes references for measurement methods used in each individual process technology, along with a large number of exercises. For faculty and students in microelectronics programs at universities in China, this book is an invaluable and excellent textbook and teaching reference, as well as a valuable resource for engineers and technicians in related fields.