Capacitive Micromechanical Gyroscope Design

Author: Li Jinming / Country: Mainland China
Publisher:
Publish Date: 2006-07-01
Features: This book systematically introduces the structural design of capacitive microelectromechanical gyros and wafer-level vacuum packaging processes based on surface micromachining. It focuses on analyzing closed-loop self-oscillation methods, angular rate signal demodulation algorithms, and circuit implementation in gyroscopes. Finally, it provides a detailed analysis and elaboration on the testing methods for key parameters of microelectromechanical gyros, such as quality factor of oscillation, resolution, operating bandwidth, sensitivity, and linearity. This book can serve as a graduate textbook or reference material for relevant disciplines in higher education institutions, as well as a technical reference for researchers and engineering professionals. This book systematically introduces the structural design of capacitive microelectromechanical gyros and wafer-level vacuum packaging processes based on surface micromachining. It focuses on analyzing closed-loop self-oscillation methods, angular rate signal demodulation algorithms, and circuit implementation in gyroscopes. Finally, it provides a detailed analysis and elaboration on the testing methods for key parameters of microelectromechanical gyros, such as quality factor of oscillation, resolution, operating bandwidth, sensitivity, and linearity. This book can serve as a graduate textbook or reference material for relevant disciplines in higher education institutions, as well as a technical reference for researchers and engineering professionals.