Micro-actuator (Micron and Nanoscience and Technology Series)

Author: Zhang Chen et al.
Publisher:
Publish Date: 2006-04-19
Features: Micro-actuators are key technologies in modern automatic control. In recent years, with the rapid development of microelectronics technology and micro-fabrication processes, especially the booming rise of micro-nanotechnology, strong technical support has been provided for the research and development of micro-actuators. This book is divided into 9 chapters, systematically elaborating on and introducing the basic principles, technical foundations, manufacturing processes, and application examples of electromagnetic micro-motors, optical actuators, micro-valves, micro-pumps, bio-micro-actuators, micro-mechanical actuators, and chemical actuators in micro-actuators. This book is suitable for engineering technicians engaged in automation and micro-nanotechnology research, as well as for reference by faculty and students in relevant disciplines at colleges and universities.