Microsensor - Principle, Technology and Application

Author: Zhang Jiliang
Publisher:
Publish Date: 2005-12-01
Features: This book provides a detailed introduction to various types of mechanical microsensors, thermal microsensors, magnetic microsensors, radiation and optical microsensors, acoustic microsensors, chemical and biological microsensors, integrated, intelligent, and smart sensors, microsensor arrays, and microsensor networks. It covers their working principles, fabrication technologies, and applications, with a focus on the latest developments in various sensors, particularly the miniaturization, integration, arraying, multifunctionalization, intelligence, systematization, and networking of sensors. This book can serve as a graduate textbook and is also a reference for teaching, research, and engineering professionals engaged in sensor-related work.