Micro-Electro-Mechanical Systems

Author: Jiang Yanfeng
Publisher:
Publish Date: 2006-03-01
Features: This book introduces the basic knowledge, main processes, and device structures related to Micro-Electro-Mechanical Systems (MEMS), and explores the hot research topics in the field. The main content is divided into five parts. First, it discusses the measurement methods of relevant mechanical quantities in MEMS, then introduces the main processes in MEMS. On this basis, it systematically introduces the sensors in MEMS systems, including the principles, structures, and implementation methods of sensors. Additionally, it discusses the usage methods and application scope of MEMS devices, and finally elaborates on the content of MEMS system simulation. This book is suitable for undergraduate or graduate students in microelectronics majors at universities as a teaching reference, and can also be used by researchers in the MEMS field. The book systematically introduces the basic knowledge, main processes, and device structures related to Micro-Electro-Mechanical Systems (MEMS), and explores the hot research topics in the field. The content includes an introduction to MEMS systems, relevant mechanical knowledge in MEMS and methods for measuring mechanical quantities, main processes in MEMS, sensors, applications of MEMS devices, as well as simulation and computer-aided design of MEMS devices. The book is rich in content, easy to understand, and highly readable.