RF MEMS Application Guide

Author: (USA) Wada
Publisher:
Publish Date: 2005-11-01
Features: This book mainly includes the following content: MEMS and RF, MEMS materials and manufacturing processes, RF switches and micro-relays, MEMS inductors and capacitors, micro-motor RF filters, micro-mechanical phase shifters, micro-mechanical transmission lines and components, micro-mechanical antennas, integration and packaging of RFMEMS. This book is suitable for readers engaged in micro-manufacturing technology, and can also serve as a reference for professionals in related fields.