Silicon Ultra-Large Scale Integrated Circuit Technology: Theory, Practice, and Models

Author: [USA] James D. Plummer, Michael D. Deal, Peter B.
Publisher:
Publish Date: 2005-12-01
Features: This book is used as the textbook for the "Silicon VLSI Manufacturing Process" course at the Electrical Engineering Department of Stanford University. The course is designed for senior undergraduate students and first-year graduate students in the microelectronics program of the Electrical Engineering Department. The greatest feature of this book is that it not only provides a detailed introduction to the practical process technologies related to the production and manufacturing of silicon VLSI chips but also emphasizes the scientific principles behind these technologies. Specifically, for each individual process technology, the book presents a vivid and intuitive physical image of the actual process through process models and process simulation software. At the same time, the book provides a detailed introduction to the measurement methods used for each step of the process technology and offers necessary analysis and discussion on the future development trends of process technologies and process models. Additionally, each chapter of the book includes references related to the content, as well as a large number of exercises. For faculty and students in microelectronics programs at universities in China, this book is an invaluable and excellent textbook and teaching reference, and it can also be used as a learning reference for engineering technicians in related fields.