Micro-Electro-Mechanical Systems Design and Manufacturing

Author: Liu Xiaoming
Publisher:
Publish Date: 2006-01-01
Features: This book provides a concise introduction to the design and manufacturing of MEMS, aimed at senior undergraduate and graduate students from non-microelectronics majors who wish to learn about MEMS technology. Through studying this book, readers will gain the necessary knowledge in integrated circuit manufacturing technology, as well as a comprehensive understanding of MEMS design and manufacturing, laying a solid foundation for conducting MEMS research. The book provides a concise introduction to the design and manufacturing of MEMS, divided into 7 chapters, including an overview of MEMS, MEMS design, basic integrated circuit manufacturing technology, MEMS manufacturing technology, and micro-sensors.