Ion Beam Surface Engineering Technology

Author: Zhang Tonghe
Publisher:
Publish Date: 2005-10-01
Features: This book mainly includes ion beam implantation technology, ion beam enhanced deposition technology, magnetron filtered ion beam deposition technology, full-surface ion implantation technology, strong pulsed ion beam material modification technology, and ion beam-based novel thin film engineering techniques. It focuses on presenting the latest research findings of these ion beam technologies and their extensive industrial applications. The content is systematic, comprehensive, and highly practical. This book serves as a reference for surface engineering technicians, as well as for students, faculty, and researchers in related fields.

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