Principles and Engineering Technology of Microelectronics Manufacturing

Author: (USA) Campbell
Publisher:
Publish Date: 2003-04-01
Features: With the development of China's economic construction and continuous progress in science and technology, new requirements and expectations will be constantly raised for higher education teaching. I believe that no matter what, to do a good job in introducing foreign textbooks, it is necessary to connect with China's actual conditions. Textbooks differ from academic monographs; they must not only focus on scientific and academic rigor but also emphasize readability, being more accessible and readers to study independently. Imported textbooks should meet the needs of higher education teaching reform. In response to the issue of outdated content in some textbooks, it is essential to purposefully introduce reference books from advanced and developing interdisciplinary fields. The arrangement of publishing English original textbooks and translated textbooks should be coordinated with domestically published textbooks. We strive to make this series of textbooks as much as possible meet the above requirements, hoping they can be placed on students' desks and play a certain role.
This book systematically introduces the principles and engineering technologies of microelectronics manufacturing, covering all fundamental single-process technologies involved in integrated circuit manufacturing, including lithography, plasma and reactive ion etching, ion implantation and diffusion, oxidation, evaporation, vapor-phase epitaxy, sputtering, and chemical vapor deposition. For each single process, it not only discusses the technology but also rapid thermal processing, next-generation lithography, molecular beam epitaxy, and metal-organic chemical vapor deposition. On this basis, the book discusses how to integrate these single processes into various common integrated circuit technologies, such as CMOS technology, bipolar technology, and gallium arsenide technology. It also introduces the new field of microelectronics manufacturing—microelectromechanical systems (MEMS) and their technologies.
This book can serve as a textbook or reference for undergraduate and graduate students in microelectronics-related courses in higher education institutions. It is also suitable for professionals engaged in integrated circuit manufacturing technology and related fields for learning and reference.