Microelectronics Technology Engineering – Materials, Processes, and Testing

Author: Liu Yuling, Tan Baimei, Zhang Kailiang (editors)
Publisher:
Publish Date: 2005-03-01
Features: This book introduces the properties, processing techniques, and testing methods of substrate materials for microelectronic devices. The entire book is divided into 15 chapters, covering topics such as the properties and processing techniques of silicon single crystals, epitaxy, oxidation, diffusion, lithography, pattern transfer, etching, multi-layer wiring, packaging, bonding, micro-machining, and detection technologies. This book can serve as a university textbook for the discipline of electronic science and technology, as well as a professional reference for teachers and graduate students. Additionally, it holds significant reference value for professional technicians in IC industries and research institutions.