Micro-machining technology

Author: Liu Ming
Publisher:
Publish Date: 2004-10-01
Features: This book is one of the volumes in the "Modern Processing Technology Series." It starts with the fundamental knowledge of microfabrication technology and provides a detailed introduction to optical exposure technology, optical resolution enhancement technology, electron beam lithography technology, X-ray lithography technology, extreme ultraviolet lithography technology, etching technology, and other nanofabrication technologies. The book comprehensively reflects the current state of microfabrication technology in China and, based on this, introduces advanced international microfabrication technologies and their development trends. It serves as a reference for researchers, undergraduate and graduate students, as well as individuals interested in microelectronics.