Photonic MEMS

Author: Takahashi Hiroshi, Kashiwaba Kazuhiko, Kiyota Kiyohira, Katsura Yasuyoshi
Publisher:
Publish Date: 2002-07-01
Features: This book is the 9th volume in the series "Advanced Optical Technology." Focusing on optical technology as its core, it comprehensively explains the fundamental knowledge required in fields such as optics, mechanics, precision machinery, and electronics in information technology, as well as the integrated technology of opto-micro-electro-mechanical systems (OMEMS). The book primarily discusses the origins and technical components of OMEMS, the control of light beam intensity in information devices, the discontinuous and continuous tracking control of beam position, velocity control techniques, and fundamental optics and mechanics in OMEMS. It also cites numerous outstanding achievements in OMEMS, covering various micro-scale measurements, sensing, actuation, and system fabrication. This book is suitable for undergraduate and graduate students, as well as researchers and professionals engaged in measurement technology and instruments, microtechnology, and nanotechnology.