Silicon Ultra-Large Scale Integrated Circuit Technology: Theory, Practice, and Models (English Version)

Author: (USA) Plocher et al.
Publisher:
Publish Date: 2003-04-01
Features: This book is used as the textbook for the "Silicon VLSI Manufacturing Process" course at the Electrical Engineering Department of Stanford University. The course is designed for senior undergraduate students and first-year graduate students in the field of microelectronics. The greatest feature of this book is that it not only provides a detailed introduction to the practical process technologies related to the production and manufacturing of silicon VLSI chips but also elaborates on the physical images behind these process technologies. Additionally, the book includes references for the measurement methods used in each individual process technology and offers a large number of exercises. For faculty and students in microelectronics programs at Chinese universities, this book is an invaluable and excellent textbook and teaching reference, as well as a useful resource for engineers and technicians in related fields.