Semiconductor Testing Technology: Principles and Applications

Author: Liu Xinfu et al.
Publisher:
Publish Date: 2007-01-01
Features: Based on an introduction to the principles of electrical parameter testing, this book focuses on the principles and applications of the first micro-area resistivity testers in the world, which are at an internationally advanced level, demonstrating high practical application value. The book is divided into 11 chapters. Chapters 1-6 discuss the importance of micro-area electrical parameter testing, reviewing the characteristics of various semiconductor testing methods currently studied. It provides a detailed analysis of the basic principles of the four-probe measurement technique, with a focus on the conventional straight-line four-probe method, the improved Van der Pauw method, and the improved Rymsza-Wski four-probe testing method. It also investigates common issues in four-probe testing technology and introduces the principles of non-patterned, equidistant measurements on large silicon wafers with high positioning accuracy. Chapters 7-11 focus on the analysis and application of testing technology in fields such as materials science and non-contact measurement techniques. Based on semiconductor testing technology and its improvements, the book introduces multiple testing schemes for micro-area thin-film resistance, along with their implementation and applications, covering a total of 11 chapters.