MEMS and Microsystems - Design and Manufacturing

Author: Xu Tai Ran (USA), translated by Wang Xiaohao et al.
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Features: This book provides an in-depth exploration of the fundamentals of MEMS technology, covering the mechanical, physical, and materials science foundations of MEMS. It explains the basic principles of microsystems engineering and lists the applications of MEMS in manufacturing, communications, biomedical engineering, transportation, and other fields. Suitable for senior undergraduate students, lower-level graduate students, and engineers in the fields of mechanical, electronic, manufacturing, biomedical, and aerospace.
· Covers the electromechanical characteristics and microfabrication processes of MEMS.
· Introduces the processing, manufacturing, and packaging of MEMS devices.
· Provides practical design workflows, explaining how engineers plan and fabricate new MEMS devices and microsystems, as well as CAD techniques for microsystems.
· Includes numerous examples and problems to aid learning.
Microsystems have rapidly developed in recent years and have found wide applications in aerospace, automotive, biotechnology, consumer products, defense, environmental protection and safety, security, pharmaceuticals, and remote communication industries. This book offers an in-depth examination of the fundamentals of MEMS technology, divided into 11 chapters. It introduces the development, market, and products of microsystems engineering, as well as the foundational knowledge of various engineering disciplines involved in microsystems, scale effects, materials for microsystems engineering, microfabrication and microprocessing techniques, and the design and packaging of microsystems. This book can serve as a textbook for undergraduate or graduate courses and also as a reference for professionals and related personnel to understand MEMS.