Electrochemistry of Silicon and Its Oxides: Surface Reactions, Structures, and Microfabrication

Author: Zhang Xian, Editor-in-Chief
Publisher:
Publish Date: 2004-09-01
Features: This book systematically introduces all the knowledge of electrochemistry of silicon and its oxides from theory to practice, including detailed explanations of the silicon/electrolyte interface, anodic oxidation, etching, photoeffects, cathodic properties, redox pairs, porous silicon, and photoelectrochemistry. It holds significant practical value for researchers studying silicon surface phenomena and engineers developing silicon-based electronic devices. The electrochemistry of silicon is crucial in silicon technology and processes, as well as in electrochemical systems. This book comprehensively introduces the electrochemical knowledge of silicon in aqueous solutions. Therefore, it is suitable for researchers and engineers in the field of silicon and its oxides, as well as for students in related disciplines.