Micro-electro-mechanical systems (MEMS)

Author: Zhang Wendong
Publisher:
Publish Date: 2006-01-01
Features: This book introduces the development status of micro-opto-electro-mechanical systems (MOEMS) both domestically and internationally, the structural design and simulation of micro-devices, and common micro-manufacturing technologies. It focuses on various MOEMS devices, including micro-mechanical devices, RF micro-devices, micro-optical devices, microfluidic devices, as well as micro-temperature sensors and micro-magnetic field sensors, among others.