Author: Liu Yuling, Wang Juan, Zhang Xihui
Publisher:
Publish Date: 2005-07-01
Features: This book primarily introduces the basic properties of cleaning main materials, cleanroom purification technology and principles, high-purity gas preparation, and the purification of ultra-pure reagents. It also focuses on discussing existing common cleaning methods and technologies, detailing several typical cleaning examples, particularly in the electronics industry. Additionally, it covers new cleaning technologies and methods. By studying this book, readers can lay a solid foundation for mastering existing cleaning technologies and principles, as well as further optimizing and innovating new methods and technologies. During the writing process, extensive references were made to domestic and international professional cleaning technology materials, emphasizing the explanation of fundamental concepts while reflecting the latest technologies and achievements in the field of cleaning technology in recent years. This book can serve as teaching material for relevant majors in higher education institutions, a professional reference for teachers and graduate students, and a reference for professional technical personnel in enterprises and research institutions. This book primarily introduces the basic properties of cleaning main materials, cleanroom purification technology and principles, high-purity gas preparation, and the purification of ultra-pure reagents. It also focuses on discussing existing common cleaning methods and technologies, detailing several typical cleaning examples, particularly in the electronics industry. Additionally, it covers new cleaning technologies and methods. By studying this book, readers can lay a solid foundation for mastering existing cleaning technologies and principles, as well as further optimizing and innovating new methods and technologies. This book can serve as teaching material for relevant majors in higher education institutions, a professional reference for teachers and graduate students, and a reference for professional technical personnel in enterprises and research institutions.
Washing Technology Basics
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