Modern optical thin film technology

Author: Tang Jinfa et al.
Publisher:
Publish Date: 2006-11-01
Features: Optical thin films is a highly interdisciplinary engineering science. Its theoretical foundation is electromagnetic field theory and Maxwell's equations, involving the reflection, transmission, and polarization characteristics of light during propagation through layered media. This book Part I primarily introduces the theoretical calculation of optical thin film characteristics, the design theory and technology of optical multilayer films, written by Professor Tang Jinfa. Part II mainly introduces the manufacturing technology of optical thin films, including film deposition techniques represented by physical vapor deposition technology, covering vacuum equipment, thin film materials, preparation parameter control technology, thin film thickness monitoring technology, film thickness uniformity, and the influence of preparation parameters on the microstructure of thin films. Part III primarily introduces the testing technology of thin film optical characteristics and optical constants, as well as the evaluation technology of thin film mechanical properties. Since optical thin film technology is also a highly interdisciplinary subject involving fields such as optoelectronics, computer science, vacuum technology, materials science, and automatic control technology, an appendix has been added to meet the learning needs of optical thin film workers from different fields, mainly introducing several fundamental theories of mathematical physics.