Micro-Electro-Mechanical Systems (Series on Opto-Electro-Mechanical Integration Technology)

Author: Zhang Wendong, Xiong Jijun
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Features: This book introduces the development status of micro-optical-electro-mechanical systems (MOEMS) both domestically and internationally, the structural design and simulation of micro-devices, common micro-manufacturing technologies such as surface processing, bulk silicon processing, and LIGA technology, packaging technology, and more. The focus of the book is to introduce various MOEMS devices, including micro-mechanical devices, RF micro-optical devices, microfluidic devices, as well as micro-temperature sensors and micro-magnetic field sensors. When introducing micro-devices, the book starts with the working principles, process steps, and performance indicators of each device, aiming to help readers better understand the various micro-devices and micro-systems that have already been developed and to consider their use in practical engineering. This book can serve as a reference for engineering design personnel engaged in MOEMS technology application and development, science and technology management personnel, and postgraduate students in related fields.