Thermodynamic coupling model for low-pressure chemical vapor deposition of diamond

Author: Wang Jitao
Publisher:
Publish Date: 2000-03-06
Features: Since the 1980s, the new technology of activating low-pressure diamond vapor deposition has gradually become a research hotspot worldwide. Many experiments have been conducted, and various attempts have been made from different aspects. Theoretically, the new concept of non-equilibrium steady-state phase diagrams proposed by the author of this book has opened up a completely new field. This book systematically introduces related content, mainly including thermodynamic foundations, non-equilibrium thermodynamics of activating low-pressure diamond growth, diamond growth phase diagrams of the C-H-O ternary system, diamond vapor deposition phase diagrams of other ternary systems such as carbon-hydrogen-halogen, and phase diagrams of some commonly used binary and pseudo-binary systems.