RFMEMS Application Guide

Author: Zhao Haisheng
Publisher:
Publish Date: 2005-11-01
Features: This book mainly includes the following content: MEMS and RF, MEMS materials and manufacturing processes, RF switches and micro relays, MEMS inductors and capacitors, micro motor RF filters, micro-electromechanical phase shifters, micro-electromechanical transmission lines and components, micro-electromechanical antennas, integration and packaging of RFMEMS. This book can be read by personnel engaged in micro-manufacturing technology, and can also serve as a reference for professionals in related fields.