Thin film technology and thin film materials

Author: Tian Minbo
Publisher:
Publish Date: 2006-08-01
Features: The application scope of thin film and microfabrication technology is extremely broad, ranging from large-scale integrated circuits, electronic components, flat-panel displays, information recording and storage, MEMS, sensors, solar cells, to surface modification of materials, covering all fields of high-tech industries. This book includes five major parts: vacuum technology fundamentals, thin film preparation, microfabrication, thin film materials and applications, and thin film composition and structure analysis. It covers all aspects of thin film technology and materials, with comprehensive knowledge and clear structure. The book consists of 17 chapters, with easy-to-understand text and numerous illustrations, facilitating the understanding, mastery, and application of basic knowledge. For scientists and engineers working in related industries, this book offers highly valuable reference material. It is also an excellent introductory book for readers interested in learning about thin film materials and their applications in high-tech industries.
The application scope of thin film and microfabrication technology is extremely broad, ranging from large-scale integrated circuits, electronic components, flat-panel displays, information recording and storage, MEMS, sensors, solar cells, to surface modification of materials, covering all fields of high-tech industries. This book includes five major parts: vacuum technology fundamentals, thin film preparation, microfabrication, thin film materials and applications, and thin film composition and structure analysis. It covers all aspects of thin film technology and materials, with comprehensive knowledge and clear structure. The book consists of 17 chapters, with easy-to-understand text and numerous illustrations, facilitating the understanding, mastery, and application of basic knowledge. For scientists and engineers working in related industries, this book offers highly valuable reference material. It is also an excellent introductory book for readers interested in learning about thin film materials and their applications in high-tech industries.