Author: Tang Weizhong
Publisher:
Publish Date: 2005-08-01
Features: This book discusses the commonly used vacuum technology in thin film material preparation, various physical and chemical vapor deposition techniques, the formation of the microstructure of thin films, and the characterization methods for the thickness, microstructure, and composition of thin film materials.
Principles, Technology, and Applications of Thin Film Material Preparation (2nd Edition) (2nd Edition)
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