Micro-nano technology and its applications

Author: Li Desheng
Publisher:
Publish Date: 2005-07-01
Features: Based on an overview of the development background, current status, and application prospects of Micro-Electro-Mechanical Systems (MEMS) technology, this book discusses the fundamental theoretical basis of MEMS and provides a detailed introduction to related processes. It covers the working principles and manufacturing processes of various typical physical and chemical sensors, as well as the applications of MEMS. The book also offers a comparative discussion on micro-actuators/micro-operators, micro-mechanical components, micro-pumps, and micro-electro-mechanical systems. Additionally, it introduces technologies related to biochips and nanotechnology. This book serves as a reference for researchers and technicians in fields such as microelectronics, mechatronics, precision instruments, and instrumentation, and can also be used as a teaching reference for advanced undergraduate and graduate students in related disciplines. Based on an overview of the development background, current status, and application prospects of Micro-Electro-Mechanical Systems (MEMS) technology, this book discusses the fundamental theoretical basis of MEMS and provides a detailed introduction to related processes. It covers the working principles and manufacturing processes of various typical physical and chemical sensors, as well as the applications of MEMS. The book also offers a comparative discussion on micro-actuators/micro-operators, micro-mechanical components, micro-pumps, and micro-electro-mechanical systems. Additionally, it introduces technologies related to biochips and nanotechnology. This book serves as a reference for researchers and technicians in fields such as microelectronics, mechatronics, precision instruments, and instrumentation, and can also be used as a teaching reference for advanced undergraduate and graduate students in related disciplines.