Electron beam ion beam technology

Author: Zhao Yuqing
Publisher:
Publish Date: 2002-03-01
Features: This book introduces the production, extraction, acceleration, deflection, and working principles of electron beams and ion beams, as well as their physical processes and main components. It covers the principles and results of charged particle beam interactions with solid surfaces, and some applications of electron beam and ion beam technology in the microelectronics field. Finally, it introduces the rapidly developing scanning tunneling, which is closely related to nanotechnology in recent years.