Fundamentals of Microelectronics Chemical Technology

Author: Liu Yuling Li Weiwei Zhou Jianwei
Publisher:
Publish Date: 2005-07-01
Features: This book introduces chemical technologies related to very large-scale integrated circuits. The entire book is divided into 11 chapters, covering topics such as the chemical properties of silicon materials and silicon compounds, substrate processing, environmental purification, the preparation of purified water, cleaning techniques, silicon vapor epitaxy, bonding, micromechanical processing, device oxidation, diffusion and ion implantation, lithography, etching, multilayer wiring and global planarization, electroplating and chemical plating, as well as metal processing. This book can serve as a senior textbook for the discipline of electronic science and technology, and also as a professional reference for teachers and graduate students. Additionally, it holds significant reference value for professional technicians in microelectronics-related enterprises and research institutions.