Precision Worktable Technology in Micro/Nano Machining

Author: Liu Junbiao et al
Publisher:
Publish Date: 2005-03-01
Features: This book is one of the volumes in the series "Micro/Nano Processing Technology Based on Electron, Ion, and Photon Beams." It complements the previously published book "Electron Beam Exposure Micro/Nano Processing Technology" by focusing on the key components of micro/nano processing—the structure, principles, and main technologies of precision workstations—as well as effective methods to improve processing accuracy and production efficiency using precision workstations. The book is divided into nine chapters. Chapter 1 discusses the composition, current development status, and main technical indicators of precision workstations. Chapters 2 to 5 systematically introduce the working principles, technical characteristics, and selection criteria of precision measurement technology, drive technology, and linear guidance technology. Chapter 6 illustrates the principles and structural features of micro-displacement technology through examples. Chapters 7 and 8 cover the control systems, accuracy analysis, and accuracy compensation methods of precision workstations. Chapter 9 primarily introduces the specific applications and development prospects of precision workstations in the microelectronics industry, precision measurement, biochip technology, nanosurface topography measurement, and nanomanufacturing equipment. Given the rapid development of micro/nano processing technology and the scarcity of related specialized books and technical publications, the publication of this book is expected to play a positive role in promoting the research and development of micro/nano processing technology in China.