Microsystem Principles and Technology

Author: Fu Jianzhong/Hu Xuxiao (editors)
Publisher:
Publish Date: 2005-03-01
Features: Microsystem technology is based on design and manufacturing techniques at the micrometer scale, focusing on the research and development of microsensors, microactuators, as well as signal processing and control circuits, ultimately integrating interfaces, communication, and power into miniature devices or systems. Microsystems can accomplish tasks that large-scale electromechanical systems cannot, and they can also be embedded into large-scale systems, elevating automation, intelligence, and reliability to a new level. It is expected that microsystems will become a pivotal new field in science and technology in the future, with broad application prospects. This book systematically elaborates on the fundamental concepts, principles, and characteristics of microsystem technology; comprehensively introduces microsystem design techniques, microfabrication technology, microsystem testing technology, microsystem integration and control technology, and typical microsystems—microfluidic chip technology. This book can serve as a selective course material and extracurricular reading for graduate students and senior undergraduate students in relevant disciplines at universities. It is also suitable for professionals and individuals interested in microsystem technology.
Microsystem technology is based on design and manufacturing techniques at the micrometer scale, focusing on the research and development of microsensors, microactuators, as well as signal processing and control circuits, ultimately integrating interfaces, communication, and power into miniature devices or systems. Microsystems can accomplish tasks that large-scale electromechanical systems cannot, and they can also be embedded into large-scale systems, elevating automation, intelligence, and reliability to a new level. It is expected that microsystems will become a pivotal new field in science and technology in the future, with broad application prospects. This book systematically elaborates on the fundamental concepts, principles, and characteristics of microsystem technology; comprehensively introduces microsystem design techniques, microfabrication technology, microsystem testing technology, microsystem integration and control technology, and typical microsystems—microfluidic chip technology. This book can serve as a selective course material and extracurricular reading for graduate students and senior undergraduate students in relevant disciplines at universities. It is also suitable for professionals and individuals interested in microsystem technology.