Small as an ant -- Semiconductor sensors and microelectromechanical systems series

Author: Wang Wei
Publisher:
Publish Date: 1999-11-01
Features: This book is written around the National Key Basic Research Program of China (B), "Microelectromechanical Systems," and appropriately expanded upon, serving as a popular science reading material. Semiconductor sensors convert external environmental information into electrical signals by utilizing semiconductor properties, serving as an integrated device for acquiring, processing, and executing information. Using microelectronics and micro technology, it is possible to manufacture semiconductor sensors and microelectromechanical systems with millimeter dimensions, as small as ants. The book provides an in-depth yet accessible introduction to the current development levels of semiconductor sensors and microelectromechanical systems internationally, briefly introduces the research achievements of Chinese scientists in the National Key Basic Research Program project "Microelectromechanical Systems," and outlines future development trends in this field both domestically and internationally.