Microsystem Design

Author: Senturia
Publisher:
Publication Date: 2004-11-01
Features: This book organically connects fundamental knowledge from multiple disciplines, guiding readers into the world of microsystem design. These are essential for engineers working in the MEMS field. The book covers a wide range of topics, including microfabrication techniques, mechanics, heat flow theory, electronics, noise, and system dynamics with or without feedback. Because it is difficult to succinctly explain the basic principles of "good" design, the book is organized around a series of case studies—either based on real products or prototypes published in the literature. The case studies are selected to represent a diverse range of examples: different fabrication methods, different application domains, and the use of various physical effects in transduction. The primary focus of the case studies is the design and packaging of the following devices: piezoresistive pressure sensors, capacitive accelerometers, gyroscopes using piezoelectric actuation and sensing, two electrostatic actuation projection displays, two DNA amplification microsystems, and a catalytic sensor for combustible gas measurement. This book serves as the textbook for the MIT graduate course "Microelectromechanical Systems Design and Fabrication" and is suitable for advanced undergraduate and graduate students studying MEMS. It can also be used as a reference for MEMS professionals. Each chapter includes homework assignments and related reading materials as supplementary resources. The book also has a dedicated website for additional support, featuring more homework problems, exercises, and recommended design problems, as well as teaching materials related to the book's case studies and homework. This book is a graduate-level textbook written by Professor Senturia of MIT, based on the courses he taught in the Department of Electrical Engineering at MIT. It has been adopted by more than 10 universities in the U.S. (including Stanford and other renowned institutions). The book systematically and comprehensively introduces the methods, theories, and technologies involved in MEMS design, including MEMS fabrication and packaging techniques, modeling and simulation of MEMS devices, and related electronic circuits and systems. It details the modeling, simulation, and analysis of MEMS devices using lumped parameter methods, elastic and structural mechanics methods, and energy analysis methods. It also analyzes and introduces energy dissipation issues in microsystem design, as well as fluid dynamics systems, circuits, noise, and packaging issues. Through case studies, the book provides detailed introductions to the design and fabrication of devices and systems such as piezoresistive pressure sensors, capacitive accelerometers, electrostatic projection displays, piezoelectric rate gyroscopes, DNA amplification chips, and gas sensors. The book has an innovative structure, distinctive features, and rich content, meeting the needs of graduate students from diverse disciplines studying MEMS. At the same time, it is also a highly valuable reference for researchers, engineers, and teachers in related fields.