Microelectronics Technology Engineering: Materials, Processes, and Testing: Materials, Processes, and Testing

Author: Liu Yuling
Publisher:
Publish Date: 2004-10-01
Features: This book introduces the properties, processing techniques, and testing methods of substrate materials for microelectronic devices. The book is divided into 15 chapters, covering topics such as the properties and processing techniques of silicon single crystals, epitaxy, oxidation, diffusion, lithography, pattern transfer, etching, multilayer wiring, packaging, bonding, micromechanical processing, and testing techniques. This book can serve as a university textbook for the discipline of electronic science and technology, as well as a professional reference for teachers and graduate students. It also holds significant reference value for professional technicians in IC industries and research institutions.