Micro-electromechanical systems and micro-manufacturing technology

Author: Yuan Weizheng
Publisher:
Publish Date: 2000-08-01
Features: Micromechanics is a brand-new discipline that emerged in the late 1980s and is hailed as one of the most representative technologies of the 21st century. This book is divided into 8 chapters, systematically introducing the origin, development process, and current research content and achievements in the field of micromechanics, based on the author's recent research work. The content includes the theoretical foundation of micromechanics, micromechanical materials and microstructures, micromanufacturing technologies, (quasilaser micromanufacturing technology), microtesting technologies, microsensors, microactuators, and other microdevices, as well as typical micro-electro-mechanical systems and micromechanical robots. This book is suitable for scientists and engineers engaged in micromechanics research, as well as for reference by students and teachers in related disciplines.