Diamond thin film deposition and preparation process and application

Author: Dai Dahuang
Publisher:
Publish Date: 2001-06-01
Features: This book is suitable for researchers and engineering technicians in the field of materials science and engineering, especially those working on diamond thin films; it can also serve as a reference for senior undergraduate and graduate students in materials science major engaged in diamond thin film research. It is a comprehensive book that describes the deposition preparation processes and applications of diamond thin films. Starting from the excellent properties and application prospects of diamond thin films, the book elaborates on various deposition methods for thin films. It discusses the nonequilibrium thermodynamics of diamond thin films and the dynamic factors of the acoustic field of diamond films. It also provides a detailed exploration of key technologies and film formation processes for hot-filament devices capable of large-area diamond film deposition and the plasma jet device with the highest deposition rate today. Additionally, it introduces the preparation process, properties, and applications of, which has performance close to that of diamond films, is easily industrialized, and has promising application prospects. Finally, it looks ahead to the future development prospects of diamond films, pointing out that diamond films will undoubtedly become influential functional thin film materials in the 21st century.