Micro-electro-mechanical systems and their applications

Author: Liu Guangyu
Publisher:
Publish Date: 2003-02-01
Features: This book comprehensively integrates a large number of publicly published scientific and technical literature on microelectromechanical systems (MEMS) with the results of our recent research. It primarily introduces the current content, applications, and development of microelectromechanical systems. The content includes six parts: the composition and applications of microelectromechanical systems, functional materials for microelectromechanical systems, microfabrication technologies, microelectromechanical actuators, microelectromechanical sensors, and weak signal detection and processing. The book is rich in content, appropriately illustrated, novel, and practical. It can serve as a textbook for graduate students and senior undergraduate students in relevant fields at universities, as well as a reference for engineering technicians in microengineering fields such as detection and control.