Microsensor, MEMS, and smart devices

Author: Gardner
Publisher:
Publish Date: 2004-03-01
Features: Microsensors and microelectromechanical systems (MEMS, micro=electro=mechanical systems) are revolutionizing the semiconductor industry. Microsystems or system-on-a-chip integrate microelectronic circuits and microactuators to form a new research hotspot with broad application areas. This book systematically introduces microsensor technology and organically combines microsensors, microelectromechanical systems, and smart devices, making it suitable for senior undergraduate and graduate students and researchers in the field of microelectronics, as well as engineers and developers in microsensor systems. Due to its comprehensive and rich content, the book is also highly valuable for researchers in mechanical, physical, and material science fields.