Micro inertial instruments: Micro-mechanical accelerometer: Micro-mechanical accelerometer

Author: Dong Jingxin
Publisher:
Publish Date: 2003-04-01
Features: Micromechanical accelerometers are MEMS devices based on IC technology and micromechanical processing technology, with broad application prospects in both military and civilian fields. This book is based on the author's participation in the "Nineth Five-Year Plan" and "Tenth Five-Year Plan" key research projects and Tsinghua University's "Project 985" university-level key projects. The book is divided into 9 chapters, mainly including: the types, working principles, and mathematical models of micromechanical accelerometers, the structure and circuit of capacitive micromechanical accelerometers, the integration, error analysis, main performance indicators, and testing methods of micromechanical accelerometers, as well as their applications and further research trends. In addition to providing reference value for the research and application of micromechanical accelerometers, the content of this book also has reference significance for the study of other inertial instruments and even other MEMS devices. It is suitable for scientists and engineers in the field of inertial technology, microelectromechanical systems, and related application fields.