Thin film materials and thin film technology

Author: Zheng Weitao
Publisher:
Publish Date: 2004-01-01
Features: This book systematically elaborates on the fundamental theories and basic knowledge of thin film materials and thin film technology, with a focus on introducing the vacuum preparation techniques for thin film materials, chemical and physical deposition methods for thin films, principles of thin film formation and growth, and characterization of thin films. It also provides an introduction, review, and outlook on several major thin film materials that are widely studied and applied. This book is suitable for researchers and technical personnel engaged in material research, as well as students and faculty of relevant disciplines at colleges and universities. It can also be used as a graduate textbook.